Product category:
Pumps, Vacuum pumps
News Release from: Integrated Dispensing Systems | Subject: CMP pumping
Edited by the Processingtalk Editorial
Team on 28 June 2007
Pump for abrasive polishing slurry
Integrated Dispensing Systems offer the rugged valveless Fluid Metering pumps for use on the abrasive slurry used in polishing semiconductor wafers during production
The polishing process is called Chemical Mechanical Planarisation (CMP), and in this, precision polishing machines use a fine ceramic slurry to make wafer surfaces as flat (planar) as possible The Fluid Metering pumps from Integrated Dispensing Systems are used for both the chemical formulation of the slurry, as well as maintaining the mechanical properties of the slurry during the planarisation process through the addition of hydrogen peroxide and DI water
This article was originally published on Processingtalk on 24 Apr 2003 at 8.00am (UK)
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Following the planarisation process, the same pumps are used for cleaning the wafers, a process requiring the metering of ammonium hydroxide and hydrogen peroxide for removal of residual slurry from the polished wafer surface.
The cleaning is critical for preparation of the wafer for photo-lithography processes that follow.
FMI Pumps are ideal for CMP and cleaning because the pump internal parts are made of sapphire-hard, chemically resistant ceramics which resist both mechanical wear and chemical attack.
The unique valveless pumping principle uses a rotating and reciprocating piston to accomplish both pumping and valving functions with one moving part.
Eliminating the use of valves from the pumping process increases accuracy and reliability, as well as eliminates the associated pump maintenance - with no valves there is no wear!!.
Fluid Metering has worked closely with the semiconductor industry to configure pumps and pumping systems specifically designed to meet the stringent requirements of wafer manufacturing.
The valveless pump product line includes component models designed for integration into OEM semiconductor tools, as well as systems designed for process and production automation.
For more information contact Integrated Dispensing Systems.
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