Product category:
Pressure/temperature regulators, steam traps
News Release from: Parker Hannifin | Subject: MiniQ
Edited by the Processingtalk Editorial
Team on 09 November 2005
Miniature regulator for high purity
gases
Miniature regulator for high purity gases packs high performance into a compact footprint, with a high Cv and broad operating pressure range
The Veriflo division of Parker Hannifin has introduced a miniature point-of-use pressure regulator designed to reduce semiconductor tool real estate and costs Despite a compact footprint of just 1.25 inches square (31.75 mm), the new MiniQ offers excellent performance including a Cv of 0.1 and an ability to accommodate inlet pressures to 500 PSIG (35 Barg)
This article was originally published on Processingtalk on 19 Jun 2008 at 8.00am (UK)
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MiniQ is a threadless style, non-tied, double-diaphragm regulator for pressure control of high purity gases.
Designed using the same dimensions as the well-known Veriflo Quantum valves and SQMicro regulators, it allows semiconductor tool OEMs to mount gas stick components more closely, to reduce system footprints.
The regulator offers exceptional performance for a miniature design.
This includes a Cv (flow coefficient) of 0.1 typical, and a maximum inlet pressure of 500 PSIG (35 Barg) with a choice of outlet pressure ranges of 1-30, 1-60, 2-100 or 3-250 PSIG (from 2 to 17 Barg).
This relatively high Cv and broad operating range means that the MiniQ is purged rapidly, and may be used in a wide variety of regulator applications - allowing tool OEMs to standardise on one component across a range of systems.
Fabricated from 316L stainless steel, with Hastelloy C-22 diaphragms and an Inconel poppet, the MiniQ is available with either tube stub or face seal connections.
For extended reliability and life, the valve features a PCTFE seat with a poppet design that is self-centering, for repeatable positive closure.
The standard surface finish (Ra value) is 10 micro-inch or less, with a 5 micro-inch finish available as an option.
The MiniQ operates over a -40 to +150 degrees F (-40 to +66 degrees C) temperature range. Request a free brochure from Parker Hannifin ...
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