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Product category: Liquid Analysis: Spectroscopy, Colour
News Release from: Thermo Fisher Scientific (Molecular Spectroscopy) | Subject: lab-to-fab solutions
Edited by the Processingtalk Editorial Team on 28 February 2006

Measurement and metrology for
semiconductors

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Thermo Electron has published of a new brochure demonstrating its complete range of high performance solutions for the semiconductor, microelectronics and disk storage manufacturing industry

Thermo Electron Corporation, the world leader in analytical instrumentation, announces the publication of a new brochure demonstrating its complete range of high performance solutions for the semiconductor, microelectronics and disk storage industry This 8-page brochure provides process and defect engineers, as well as production managers, with a quick reference to the Thermo capability and offerings in the fields of plasma mass spectroscopy, FT-IR metrology, Raman microspectroscopy and numerous X-ray spectroscopies including angle-resolved XPS, microbeam XRF and EDS for electron microscopy and defect review

The new brochure demonstrates Thermo expertise in these manufacturing environments with specifically engineered instrumentation in both the support lab, and on the fab floor with near-line and at-line measurement and metrology tools that meet the rigorous demands of production monitoring.

The new brochure provides a review of the capabilities, characteristics, benefits and applications of this instrument family, and provides background regarding the underlying technique to each instrument.

As yield management tools to monitor production parameters and locate defects become even more critical to the financial success of the fabrication units, and as wafer sizes grow to 300 mm and feature sizes shrink to 45 nanometers, fast and reliable methods that accurately measure the chemistry and physical dimensions of silicon wafers and packaging are imperative.

Thermo offers several proven techniques for the production of semiconductor wafers, microchips, solid state circuitry and microelectronics.

Many of the semiconductor production monitoring tools from Thermo include wafer handling automation built to industry-standard guidelines and feature built-in automated analytical methods tied to production control and an information system.

As this brochure demonstrates, Thermo brings research quality instrumentation from the support lab to the fab floor in a variety of industry-leading measurement, metrology and production control solutions.

For more information about the lab-to-fab solutions for the semiconductor and microelectronics industry from Thermo, or to receive a copy of the new brochure, please contact the sales office via phone or the web.

Thermo Fisher Scientific (Molecular Spectroscopy): contact details and other news
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