Product category:
Liquid Analysis: Spectroscopy, Colour
News Release from: Thermo Fisher Scientific (Molecular Spectroscopy) | Subject: ECO 3500
Edited by the Processingtalk Editorial
Team on 19 July 2007
ECO3500 next generation 300mm FT-IR
metrology tool
Thermo Fisher Scientific, the world leader in serving science, introduces their latest FT-IR metrology system, the Thermo Scientific ECO 3500, featuring the highest cleanliness standards
Incorporating a unique Spartan equipment front-end solution from Asyst Technologies, a leading supplier of integrated automation systems that can enhance semiconductor manufacturing productivity, the ECO 3500 benefits from the highest industry standards of cleanliness in microenvironments Also featuring a proven spectrometer and enhanced analytical software, the ECO 3500 is designed for seamless integration into automated wafer handling facilities
This article was originally published on Processingtalk on 5 Jun 2008 at 8.00am (UK)
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The new ECO 3500 FT-IR metrology tool will be showcased on the Thermo Scientific booth #1806, South Hall at Semicon West 2007, in the Moscone Centre, San Francisco, California, from 16-20 July.
The ECO 3500 is a complete lab-to-FAB solution.
An enhanced software interface provides full SEMI E95 compliant access for process engineering, research and production monitoring applications.
Improved wafer handling capabilities include two in-line load ports and a new high precision edge grip stage that brings an even higher degree of accuracy and repeatability to the product line.
The ECO 3500 is the only FT-IR metrology tool to utilise the Asyst Technologies new, state of the art EFEM rated ISO class 1 for particle contamination, exceptional operational speed and simplified mechanical design.
The unique dual end-effector configuration with two 300mm in-line load ports speed up the wafer transfer process between the FOUP (front opening unified pod) and the wafer stage and optimises sample throughput.
Installation of the Thermo Scientific ECO 3500 is much improved with an air-cooled infra-red source in place of the conventional use of cooling water.
Reliability is enhanced through the use of a KBr Beamsplitter mounted in a purged housing.
The ECO 3500 is capable of undertaking a wide range of chemical analyses including ppm level measurement of carbon and oxygen in silicon, weight percent level measurement of dielectric films such as boron or phosphorus in BPSG (borophosphosilicate glass) and compositional analysis of hydrogen in silicon nitride and oxy-nitride films.
The spectrometer is also suitable for several key dimensional measurements such as epitaxial film thickness and SOI or MEMS thickness.
For more information on the Thermo Scientific ECO 3500 FT-IR metrology tool, please visit booth #1806, South Hall at Semicon West 2007 in San Francisco.
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