Precision pump delivery for semiconductor factory

TechnaFlo magnetically coupled external gear pumps have found a niche market for their precision metering and chemical resistance qualities in the semiconductor manufacturing industry

TechnaFlo magnetically coupled external gear pumps from Tuthill Pump Group have found a niche market for their precision metering and chemical resistance qualities in the semiconductor manufacturing industry.

Employed to deliver coolants to heat exchangers, they help to maintain manufacturing equipment temperatures within +/- 0.5C tolerances, across temperatures ranging from -30C to 100C.

This strict temperature control is essential to ensure the geometric stability of equipment, such as the wafer chuck/clamp, and thereby minimise the risk of wafer distortion during the manufacturing process.

For this duty, the precision delivery from the TechnaFlo pump, 0.25%, and rapid response capabilities, up to 3500 rpm, are key characteristics.

When used for delivering acids/solvents during the cleaning of wafers, again Tuthill pumps are required to deliver accurately metered quantities plus withstand the corrosive action of chemicals.

Accurate metering is required for this application to ensure that specific levels of evaporation are achieved during the cleaning process.

Failure to do so could result in imperfections and chip malfunctions.

Tuthill ATEX approved TechnaFlo pumps, which are field serviceable, can handle fluids with viscosities from 0.3 to 50,000 cps and range in size from 0.02 ml/revolution up to 38 ltrs/min.

Magnetic components are of ceramic or samarium cobalt, and options for metal components include 316L stainless steel, titanium and Hastelloy.

PPS, PEEK, PTFE and LCP engineering plastics can be employed for the gears and bearings.

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